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In-Situ Observation and Characterization of Structural Evolution in a Phase-Change Memory Device by TEM-STM

Published online by Cambridge University Press:  26 July 2009

D Cha ,
SY Park ,
SJ Ahn ,
H Horii ,
DK Kim ,
YK Kim ,
SO Park ,
UI Jung ,
MJ Kim  and
J Kim
D Cha
Affiliation:
University of Texas,Dallas
SY Park
Affiliation:
University of Texas,Dallas
SJ Ahn
Affiliation:
Samsung Electronics Co,South Korea
H Horii
Affiliation:
Samsung Electronics Co,South Korea
DK Kim
Affiliation:
Samsung Electronics Co,South Korea
YK Kim
Affiliation:
Samsung Electronics Co,South Korea
SO Park
Affiliation:
Samsung Electronics Co,South Korea
UI Jung
Affiliation:
Samsung Electronics Co,South Korea
MJ Kim
Affiliation:
University of Texas,Dallas
J Kim
Affiliation:
University of Texas,Dallas

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Information
Microscopy and Microanalysis , Volume 15 , Supplement S2 , July 2009 , pp. 716 - 717
Copyright
Copyright © Microscopy Society of America 2009