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In-situ Low Energy Argon Ion Source for Artifact Free High Resolution STEM Imaging

Published online by Cambridge University Press:  05 August 2019

Mikhail Dutka ,
Romaine Isaacs ,
Anna Prokhodtseva  and
Tomáš Vystavěl
Mikhail Dutka
Affiliation:
Thermo Fisher Scientific, Achtseweg Noord 5, 5651 GG Eindhoven, Netherlands
Romaine Isaacs
Affiliation:
Thermo Fisher Scientific, Vlastimila Pecha 12, 627 00 Brno, Czech Republic
Anna Prokhodtseva
Affiliation:
Thermo Fisher Scientific, Achtseweg Noord 5, 5651 GG Eindhoven, Netherlands
Tomáš Vystavěl
Affiliation:
Thermo Fisher Scientific, Vlastimila Pecha 12, 627 00 Brno, Czech Republic

Abstract

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Type
Vendor Symposium
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 548 - 549
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Mulders, J. and Trompenaars, P. 2016. An in-situ Low Energy Argon Ion Source for Local Surface Modification. European Microscopy Congress 2016: Proceedings. 453–454Google Scholar
[2]Prokhodtseva, A., Mulders, J., & Vystavel, T. (2017). Applications of an in-situ Low Energy Argon Ion Source for Improvement of TEM and SEM Sample Quality. Microscopy and Microanalysis, 23(S1), 298-299. doi:10.1017/S1431927617002173Google Scholar