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In-Situ Focused Ion Beam Micropatterning of Ge Islands

Published online by Cambridge University Press:  01 August 2003

M. Kammler ,
R. Hull ,
A. Portavoce ,
M. C. Reuter  and
F. M. Ross
M. Kammler
Affiliation:
IBM T. J. Watson Research Center, Yorktown Heights, NY 10598
R. Hull
Affiliation:
IBM T. J. Watson Research Center, Yorktown Heights, NY 10598
A. Portavoce
Affiliation:
IBM T. J. Watson Research Center, Yorktown Heights, NY 10598
M. C. Reuter
Affiliation:
Depart. of Materials Science and Engineering, University of Virginia, Charlottesville, VA 22903
F. M. Ross
Affiliation:
Depart. of Materials Science and Engineering, University of Virginia, Charlottesville, VA 22903

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 132 - 134
Copyright
Copyright © Microscopy Society of America 2003