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In-Situ EDS Characterization of TEM Lamellae Created by Xe Plasma FIB

Published online by Cambridge University Press:  23 September 2015

Tomáš Hrnčíř ,
Christian Lang ,
Jozef Vincenc Oboňa  and
Tomáš Barták
Tomáš Hrnčíř
Affiliation:
TESCAN, Brno, Czech Republic
Christian Lang
Affiliation:
Oxford Instruments Nanoanalysis, High Wycombe, UK
Jozef Vincenc Oboňa
Affiliation:
TESCAN, Brno, Czech Republic
Tomáš Barták
Affiliation:
Oxford Instruments, Prague, Czech Republic

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 1405 - 1406
Copyright
Copyright © Microscopy Society of America 2015 

References

[1] Hrncif, T., etal., 38th ISTFA Conference Proceedings (2012), p. 26.Google Scholar
[2] Delobbe, A., etal., Microscopy and Microanalysis 20 (2014). p 298.Google Scholar
[3] Lang, C., etal., Microelectronics Reliability 54 (2014). p 1790.Google Scholar
[4] Lang, C., etal., Microscopy and Microanalysis 18 (2012). p 620.Google Scholar