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Insights into Texture and Phase Coexistence in Polycrystalline and Polyphasic Ferroelectric HfO2 Thin Films using 4D-STEM

Published online by Cambridge University Press:  01 August 2018

Everett D. Grimley ,
Sam Frisone ,
Tony Schenk ,
Min Hyuk Park ,
Chris M. Fancher ,
Thomas Mikolajick ,
Jacob L. Jones ,
Uwe Schroeder  and
James M. LeBeau
Everett D. Grimley
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Raleigh, USA
Sam Frisone
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Raleigh, USA
Tony Schenk
Affiliation:
NaMLab gGmbH, Dresden, Germany
Min Hyuk Park
Affiliation:
NaMLab gGmbH, Dresden, Germany
Chris M. Fancher
Affiliation:
Neutron Scattering Science Directorate, Oak Ridge National Laboratory, Oak Ridge, TN, USA
Thomas Mikolajick
Affiliation:
NaMLab gGmbH, Dresden, Germany
Jacob L. Jones
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Raleigh, USA
Uwe Schroeder
Affiliation:
NaMLab gGmbH, Dresden, Germany
James M. LeBeau
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Raleigh, USA

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 184 - 185
Copyright
© Microscopy Society of America 2018 

References

[1] Boscke, T. S., et al, Applied Physics Letters 99 2011) p. 102903.Google Scholar
[2] Katayama, K., et al, Journal of Applied Physics 119 2016) p. 134101.Google Scholar
[3] Grimley, E. D., et al, Advanced Materials Interfaces 2018) p. 1701258.Google Scholar
[4] Materlik, R., Kunneth, C. Kersch, A. Journal of Applied Physics 117 2015) p. 134109.Google Scholar
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[6] Tate, M. W., et al, Microscopy and Microanalysis 22 2016) p. 237.Google Scholar
[7] EDG and JML acknowledge support from the National Science Foundation (NSF) DMR-1350273. EDG acknowledges support from the NSF Graduate Research Fellowship Program (DGE-1252376). Work was performed in part at the Analytical Instrumentation Facility (a member of RTNN, a site of NNCI) at NCSU, which is supported by the State of NC and the NSF (award number ECCS-1542015).Google Scholar