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The Influence of Ga+ Ion Dose on Deposition Rate and Purity of Pt Films

Published online by Cambridge University Press:  31 July 2006

KA Dunn ,
C Breslin  and
BL Thiel
KA Dunn
Affiliation:
University at Albany - SUNY
C Breslin
Affiliation:
University at Albany - SUNY
BL Thiel
Affiliation:
University at Albany - SUNY

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2005

Type
Abstract
Information
Microscopy and Microanalysis , Volume 12 , Issue S02 , August 2006 , pp. 1282 - 1283
Copyright
© 2006 Microscopy Society of America