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Inelastic Mean Free Path Data for Si Corrected for Surface Excitation

Published online by Cambridge University Press:  15 November 2005

Gábor Tamás Orosz ,
György Gergely ,
Sándor Gurbán ,
Miklós Menyhard  and
Aleksander Jablonski
Gábor Tamás Orosz
Affiliation:
Research Institute for Technical Physics and Materials Sciences, P.O. Box 49, H-1525 Budapest, Hungary
György Gergely
Affiliation:
Research Institute for Technical Physics and Materials Sciences, P.O. Box 49, H-1525 Budapest, Hungary
Sándor Gurbán
Affiliation:
Research Institute for Technical Physics and Materials Sciences, P.O. Box 49, H-1525 Budapest, Hungary
Miklós Menyhard
Affiliation:
Research Institute for Technical Physics and Materials Sciences, P.O. Box 49, H-1525 Budapest, Hungary
Aleksander Jablonski
Affiliation:
Institute of Physical Chemistry, Polish Academy of Sciences, 01-224 Warsaw, Kasprzaka 44/52, Poland
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Abstract

Surface-sensitive electron spectroscopies, like Auger electron spectroscopy, X-ray photoelectron spectroscopy and elastic peak electron spectroscopy (EPES) are suitable techniques to investigate surfaces and thin layers. A theoretical model for electron transport is needed to process the observed electron spectra. Electron transport descriptions are based on the differential elastic cross sections for the sample atoms and the inelastic mean free path (IMFP) of backscattered electrons. An electron impinging on the sample can lose energy either due to surface or volume excitations. In the present work a Monte Carlo (MC) simulation of the elastic peak of Si, Ag, Ni, Cu, and Au for surface analysis is presented. The IMFP of Si was determined applying the EPES method. The integrated elastic peak ratio of Si with the standard metal reference samples corrected for surface excitation provided IMFP values of Si in the energy range E = 0.2–2.0 keV. Experiments were made with the ESA 31 HSA (ATOMKI) and with the DESA-100 (Staib) spectrometers. Surface correction was based on the application of Chen's model and material parameters. The Monte Carlo simulations of elastically backscattered electron trajectories were made using new EPESWIN software of Jablonski. An improvement of IMFP experimental results was achieved applying the presented procedure.

Keywords

inelastic mean free pathEPESsurface excitation
Type
Papers from the European Microbeam Analysis Society Regional Workshop in Bled, Slovenia
Information
Microscopy and Microanalysis , Volume 11 , Issue 6 , December 2005 , pp. 581 - 585
Copyright
© 2005 Microscopy Society of America

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References

REFERENCES

Chen, Y.F. (2002). Surface effects on angular distributions in X-ray-photoelectron spectroscopy. Surf Sci 519, 115–124.Google Scholar
Dubus, A., Jablonski, A., & Tougaard, S. (2000). Evaluation of theoretical models for elastic electron backscattering from surfaces. Progr Surf Sci 63, 135–175.Google Scholar
Gergely, G. (2002). Elastic backscattering of electrons: Determination of physical parameters electron transport processes by elastic peak electron spectroscopy. Progr Surf Sci 71, 31–88.Google Scholar
Gergely, G., Menyhard, M., Gurban, S., Sulyok, A., Toth, J., Varga, D., & Tougaard, S. (2001). Surface excitation effects in electron spectroscopy. Solid State Ionics 141–142, 47–51.Google Scholar
Gergely, G., Menyhard, M., Gurban, S., Toth, J., & Varga, D. (2004). Experimental measurements of the surface excitation parameters of Cu, Au, Ni, Ag, Ge and Pb based on Si and other reference standard materials. Surf Interface Anal 36, 1098–1101.Google Scholar
Gurban, S., Gergely, G., Menyhard, M., Adam, J., Adamik, M., Daroczi, Cs., Toth, J., Varga, D., Csik, A., & Gruzza B. (2002). Ag, Ge and Sn reference samples for elastic peak electron spectroscopy (EPES), used for experimental determination of the inelastic mean free path and the surface excitation parameter. Surf Interface Anal 34, 206–210.Google Scholar
Jablonski, A. (2005). Software package EPESWIN (2002), Institute of Physical Chemistry, Polish Academy of Sciences, Warsaw. Surface Interface Analysis (in press).
Jablonski, A. & Jiricek, P. (1998). Dependence of experimentally determined inelastic mean free paths of electrons on the measurement geometry. Surf Sci 412–413, 42–54.Google Scholar
Jablonski, A. & Powell, C.J. (2004). Information depth for elastic-peak electron spectroscopy. Surf Sci 551, 106–124.Google Scholar
Kwei, C.M., Wang, C.Y., & Tang, C.J. (1998). Surface excitation parameters of low-energy electrons crossing solid surfaces. Surf Interface Anal 26, 682–688.Google Scholar
Nagatomi, T., Shimizu, R., & Ritchie, R.H. (1999). Energy loss functions for electron energy loss spectroscopy. Surf Sci 419, 158–173.Google Scholar
NIST Electron Elastic-Scattering Cross-Section Database, Version 3.0, Standard Reference Data Program Database 64, 2003. U.S. Department of Commerce, National Institute of Standards and Technology, Gaithersburg, MD. Available from: http://www.nist.gov/srd/nist64.htm.
Powell, C.J. & Jablonski, A. (1999). Evaluation of calculated and measured electron inelastic mean free paths near solid surfaces. Phys Chem Ref Data 28, 19–62.Google Scholar
Tanuma, S., Ichimura, S., & Goto, K. (2000). Estimation of surface excitation correction factor for 200–5000 eV in Ni from absolute elastic scattering electron spectroscopy. Surf Interface Anal 30, 212–216.Google Scholar
Tanuma, S., Powell, C.J., & Penn, D.R. (1994). Calculations of electron inelastic mean free paths. V. Data for 14 organic compounds over the 50–2000 eV range. Surf Interface Anal 21, 165–176.Google Scholar
Werner, W.S.M., Eisenmenger-Sittner, C., Zemek, J., & Jiricek, P. (2003). Scattering angle dependence of the surface excitation probability in reflection electron energy loss spectra. Phys Rev B 67, 155412.Google Scholar
Werner, W.S.M., Smekal, W., Tomastik, C., & Stori, H. (2001). Surface excitation probability of medium energy electrons in metals and semiconductors. Surf Sci 486, L461–L466.Google Scholar
Zemek, J., Jiricek, P., Lesiak, B., & Jablonski, A. (2004). Surface excitations in electron backscattering from silicon surfaces. Surf Sci 562, 92–100.Google Scholar