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In Situ Studies of the Interaction of Dislocations with Point Defects during Annealing of Ion Implanted Si/SiGe/Si (001) Heterostructures

Published online by Cambridge University Press:  28 July 2005

Eric A. Stach
Affiliation:
Department of Materials Science and Engineering, University of Virginia, Thornton Hall, Charlottesville, VA 22903-2442 Eric A. Stach's present address is National Center for Electron Microscopy, Lawrence Berkeley National Laboratory, Berkeley, CA 94720
Robert Hull
Affiliation:
Department of Materials Science and Engineering, University of Virginia, Thornton Hall, Charlottesville, VA 22903-2442
John C. Bean
Affiliation:
Department of Electrical Engineering, University of Virginia, Thornton Hall, Charlottesville, VA 22903-2442
Kevin S. Jones
Affiliation:
Department of Materials Science and Engineering, University of Florida, 525 Engineering Building, P.O. Box 116310, Gainesville, FL 32611-6400
Ahmed Nejim
Affiliation:
Department of Electronic and Electrical Engineering, University of Surrey, Guildford, Surrey GU2 5XH, UK
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Abstract

Strained layer heterostructures provide ideal systems with which to study the dynamics of dislocation motion via in situ transmission electron microscopy, as the geometry, strain state, and kinetics can be characterized and directly controlled. We discuss how these structures are used to study dislocation-point defect interactions, emphasizing the experimental requirements necessary for quantification of dislocation motion. Following ion implantation, different concentrations and types of point defects are introduced within the SiGe epilayer depending on the implantation species, energy, and current density. By annealing samples in situ in the transmission electron microscope (TEM) following implantation, we can directly observe dislocation motion and quantify the effect of dislocation-point defect interactions on dislocation velocities. We find that dislocation motion is impeded if the implantation dose peak lies within the epilayer, as dislocations pin at point defect atmospheres. Shallow BF2 implantation into the sample capping layer results in more complicated behavior. For low current density implants, dislocation velocities may be dramatically increased; at higher current densities the magnitude of this increase is significantly smaller. Implantation of different ions separately implicates fluorine as the species responsible for the observed increases in dislocation velocities, presumably due to an electrical effect on the rate of dislocation kink nucleation.

Type
1998 ASU ELECTRON MICROSCOPY WORKSHOP
Copyright
© 2005 Microscopy Society of America

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