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In situ STEM Mechanical Experiments at Atomic-Resolution Using a MEMS Device

Published online by Cambridge University Press:  05 August 2019

Eita Tochigi ,
Takaaki Sato ,
Naoya Shibata ,
Hiroyuki Fujita  and
Yuichi Ikuhara
Eita Tochigi*
Affiliation:
Institute of Engineering Innovation, The University of Tokyo, Tokyo, Japan.
Takaaki Sato
Affiliation:
Department of Mechanical Engineering and Applied Mechanics, University of Pennsylvania, Philadelphia, USA.
Naoya Shibata
Affiliation:
Institute of Engineering Innovation, The University of Tokyo, Tokyo, Japan. Nanostructures Research Laboratory, Japan Fine Ceramics Center, Nagoya, Japan.
Hiroyuki Fujita
Affiliation:
Advanced Research Laboratories, Tokyo City University, Tokyo, Japan.
Yuichi Ikuhara
Affiliation:
Institute of Engineering Innovation, The University of Tokyo, Tokyo, Japan. Nanostructures Research Laboratory, Japan Fine Ceramics Center, Nagoya, Japan. Center for Elements Strategy Initiative for Structure Materials, Kyoto University, Kyoto, Japan.
*
*Corresponding author: [email protected]

Abstract

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Type
In situ TEM of Nanoscale Materials and Electronic Devices for Phase Transformation Studies
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 1884 - 1885
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Zhu, Y and Espinosa, HD, Proc. Natl. Acad. Sci. U. S. A. 102 (2005), p. 14503.Google Scholar
[2]Sato, T et al. , Microelectro. Eng. 164 (2016), p. 43.Google Scholar
[3]Hytch, MJ et al. , Ultramicrosc. 74 (1998), p. 131.Google Scholar
[4]Strain maps were obtained using the FRWRtools plugin for Gatan DigitalMicrograph written by CT Koch (https://www.physics.hu-berlin.de/en/sem/software/software_frwrtools).The authors acknowledge funding of Grant-in-Aid for Specially Promoted Research (Grant No. JP17H06094) and for Scientific Research (A) (Grant No. JP17H01049) from the Japan Society for the Promotion of Science (JSPS), the Elements Strategy Initiative for Structural Materials (ESISM) from the Ministry of Education, Culture, Sports, Science, and Technology in Japan (MEXT), and JSPS KAKENHI (Grant No. JP 18K13981)Google Scholar