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In situ chip-based heating studies of metal-induced layer exchange and Si crystallization using STEM, LEND and SE imaging in SEM

Published online by Cambridge University Press:  30 July 2021

Peter Denninger ,
Peter Schweizer ,
Tim Schwope ,
Christian Dolle  and
Erdmann Spiecker
Peter Denninger
Affiliation:
Institute of Micro- and Nanostructure Research (IMN) & Center for Nanoanalysis and Electron Microscopy (CENEM), Interdisciplinary Center for Nanostructured Films (IZNF), Department of Materials Science and Engineering, Friedrich-Alexander University Erlangen-Nürnberg (FAU), Erlangen, Germany, Erlangen, Bayern, Germany
Peter Schweizer
Affiliation:
Empa, Thun, Switzerland
Tim Schwope
Affiliation:
Institute of Micro- and Nanostructure Research (IMN) & Center for Nanoanalysis and Electron Microscopy (CENEM), Interdisciplinary Center for Nanostructured Films (IZNF), Department of Materials Science and Engineering, Friedrich-Alexander University Erlangen-Nürnberg (FAU), Erlangen, Germany, Erlangen, Bayern, Germany
Christian Dolle
Affiliation:
Karlsruher Institut für Technologie, Karlsruhe, Baden-Wurttemberg, Germany
Erdmann Spiecker
Affiliation:
Institute of Micro- and Nanostructure Research (IMN) & Center for Nanoanalysis and Electron Microscopy (CENEM), Interdisciplinary Center for Nanostructured Films (IZNF), Department of Materials Science and Engineering, Friedrich-Alexander University Erlangen-Nürnberg (FAU), Erlangen, Germany, Erlangen, Bayern, Germany

Abstract

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Type
Investigating Phase Transitions in Functional Materials and Devices by In Situ/Operando TEM
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 2696 - 2698
Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

Schweizer, P., Denninger, P., Dolle, C., Spiecker, E., Low energy nano diffraction (LEND) – A versatile diffraction technique in SEM, Ultramicroscopy 213 (2020) 112956CrossRefGoogle ScholarPubMed
Wang, Z., Jeurgens, L.P.H., Mittemeijer, E.J. (Eds.), Metal-induced crystallization: Fundamentals and applications, Pan Stanford Publishing, [Singapore], 2015CrossRefGoogle Scholar
The authors acknowledge funding by the German Research Foundation (DFG) via the Research Training Group GRK 1896 “In situ microscopy with electrons, X-rays and Scanning probes”Google Scholar