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Impurity Measurments in Polycrystallline Material with Atom Probe Tomography

Published online by Cambridge University Press:  26 July 2009

P Ronsheim ,
M Hatzistergos  and
P Flaitz
P Ronsheim
Affiliation:
IBM Microelectronics
M Hatzistergos
Affiliation:
IBM Microelectronics
P Flaitz
Affiliation:
IBM Microelectronics

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Information
Microscopy and Microanalysis , Volume 15 , Supplement S2 , July 2009 , pp. 276 - 277
Copyright
Copyright © Microscopy Society of America 2009