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Improving the STEM Spatial Resolution Limit

Published online by Cambridge University Press:  01 August 2018

Ondrej L. Krivanek ,
Andrew L. Bleloch ,
Niklas Dellby ,
Tracy C. Lovejoy ,
Chenglong Shi  and
Wu Zhou
Ondrej L. Krivanek
Affiliation:
Nion R&D, Kirkland, WA Department of Physics, Arizona State University, Tempe, AZ
Andrew L. Bleloch
Affiliation:
Nion R&D, Kirkland, WA
Niklas Dellby
Affiliation:
Nion R&D, Kirkland, WA
Tracy C. Lovejoy
Affiliation:
Nion R&D, Kirkland, WA
Chenglong Shi
Affiliation:
Nion R&D, Kirkland, WA School of Physics, Peking University, Beijing, China
Wu Zhou
Affiliation:
Laboratory of Vacuum Physics, University of Chinese Academy of Sciences, Beijing, China

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 18 - 19
Copyright
© Microscopy Society of America 2018 

References

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