Hostname: page-component-586b7cd67f-t7fkt Total loading time: 0 Render date: 2024-11-26T14:03:57.369Z Has data issue: false hasContentIssue false
  • English
  • Français

Improvement of TEM-EELS and Its Application for Materials in Semiconductor Devices

Published online by Cambridge University Press:  31 July 2006

K Kimoto ,
K Ishizuka  and
Y Matsui
K Kimoto
Affiliation:
National Institute for Materials Science
K Ishizuka
Affiliation:
National Institute for Materials Science
Y Matsui
Affiliation:
National Institute for Materials Science
Get access

Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

Type
Research Article
Information
Microscopy and Microanalysis , Volume 12 , Issue S02 , August 2006 , pp. 106 - 107
Copyright
© 2006 Microscopy Society of America

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)