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Improve X-ray Microanalysis in Variable-Pressure SEMs with Polycapillary X-ray Optics

Published online by Cambridge University Press:  01 August 2005

N Gao ,
B Gallagher ,
D Ackland  and
D E Newbury
N Gao
Affiliation:
X-Ray Optical Systems,Inc., East Greenbush, New York
B Gallagher
Affiliation:
X-Ray Optical Systems,Inc., East Greenbush, New York
D Ackland
Affiliation:
Lehigh University, Bethlehem, Pennsylvania
D E Newbury
Affiliation:
National Institute of Standard and Technology, Gaithersburg, Maryland

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 402 - 403
Copyright
© 2005 Microscopy Society of America