Importance of the Protective Layers and the Specimen Preparation for Reproducible APT Results

S Mutas; C Klein

doi:10.1017/S1431927611004521

Importance of the Protective Layers and the Specimen Preparation for Reproducible APT Results

Published online by Cambridge University Press: 08 April 2017

S Mutas and

C Klein

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S Mutas: Affiliation:
GLOBALFOUNDRIES Dresden, Germany
C Klein: Affiliation:
GLOBALFOUNDRIES Dresden, Germany

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Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

Type: Abstract
Information: Microscopy and Microanalysis , Volume 17 , Supplement S2 , July 2011 , pp. 730 - 731

DOI: https://doi.org/10.1017/S1431927611004521 [Opens in a new window]

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Importance of the Protective Layers and the Specimen Preparation for Reproducible APT Results

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