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Implantation, Sputtering and Electromigration: Kelvin Probe Microscopy of Focussed Ion Beam Processed SIMOX.

Published online by Cambridge University Press:  01 August 2005

M A Stevens-Kalceff  and
T L Sobey
M A Stevens-Kalceff
Affiliation:
University of New South Wales,Australia.
T L Sobey
Affiliation:
University of New South Wales,Australia.

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 376 - 377
Copyright
© 2005 Microscopy Society of America