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Impacts of Atom Probe Tomography on the Electronic and Photonic Device Technology

Published online by Cambridge University Press:  27 August 2014

C. G. Park ,
J.H. Lee ,
D.H. Jang ,
W.Y. Jung  and
S. M. Park
C. G. Park
Affiliation:
.Dept. of Materials Science and Engineering, Pohang Univ. of Science and Technology (POSTECH), Pohang, Korea .National Institute for Nanomaterials Technology, POSTECH, Pohang, Korea
J.H. Lee
Affiliation:
.Dept. of Materials Science and Engineering, Pohang Univ. of Science and Technology (POSTECH), Pohang, Korea
D.H. Jang
Affiliation:
.Dept. of Materials Science and Engineering, Pohang Univ. of Science and Technology (POSTECH), Pohang, Korea
W.Y. Jung
Affiliation:
.Dept. of Materials Science and Engineering, Pohang Univ. of Science and Technology (POSTECH), Pohang, Korea
S. M. Park
Affiliation:
.Dept. of Materials Science and Engineering, Pohang Univ. of Science and Technology (POSTECH), Pohang, Korea

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 2172 - 2173
Copyright
Copyright © Microscopy Society of America 2014