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Imaging at High Beam Energies in the Scanning Electron Microscope

Published online by Cambridge University Press:  31 July 2006

L Gignac ,
S Boettcher ,
A Bol ,
O Wells  and
M Kawasaki
L Gignac
Affiliation:
IBM
S Boettcher
Affiliation:
IBM
A Bol
Affiliation:
IBM
O Wells
Affiliation:
IBM
M Kawasaki
Affiliation:
JEOL USA

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

Type
Abstract
Information
Microscopy and Microanalysis , Volume 12 , Issue S02 , August 2006 , pp. 1444 - 1445
Copyright
© 2006 Microscopy Society of America