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Image-Spectroscopy: Applying EELS Analysis Techniques to EFTEM Series

Published online by Cambridge University Press:  02 July 2020

P.J. Thomas*
Affiliation:
Department of Materials Science and Metallurgy, University of Cambridge, Pembroke St., Cambridge, UKCB2 3QZ.
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Extract

The energy-loss spectrum of transmitted electrons contains a wealth of information regarding the physical, chemical and electronic properties of the medium under analysis. It provides a powerful means for materials characterisation in the TEM by use of electron energy-loss spectroscopy (EELS) or its spatially parallel counterpart, energy-selective imaging (ESI). Essentially, both analyses probe the same core-loss information, recording transmitted intensity / as a function of energy-loss E and spatial position x, y, to yield a three-dimensional data set I(E, x, y). Acquisition of an extended series of energy-selected images across the energy-loss range of interest has been shown to provide useful spectral as well as spatial information, with the resolution of extracted ‘image-spectra’ being determined by the energy interval between acquisitions and the width of the energy-selecting slit, as illustrated in Figure la . This mode of analysis, termed ‘image-spectroscopy’ is directly analogous to spectrum-imaging in the STEM, and offers many advantages over conventional two- or three-window elemental mapping techniques .

Type
Electron Energy-Loss Spectroscopy (EELS) and Imaging
Copyright
Copyright © Microscopy Society of America

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References

1.Plitzko, J.M. and Meyer, J., Microsc. 183 (1996) 2.Google Scholar
2.Thomas, P.J. and Midgley, P.A., Inst. Phys. Conf. Series 161 (1999) 239.Google Scholar
3.Hunt, J.A. and Williams, D.B., Ultramicroscopy 38 (1991) 47.CrossRefGoogle Scholar
4.Thomas, P.J. and Midgley, P.A., in preparation.Google Scholar
5. I should like to acknowledge Nikhil Sharma for supplying the InGaN/ MQW sample.Google Scholar