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Hybrid SEM/AFM System from Carl Zeiss Revolutionizes Analysis of Functional Micro- and Nanostructured Specimen

Published online by Cambridge University Press:  27 August 2014

Nils Anspach ,
Frank Hitzel ,
Fang Zhou  and
Soeren Eyhusen
Nils Anspach
Affiliation:
DME Nanotechnologie GmbH; Geysostraße 13, 38106 Braunschweig, Germany
Frank Hitzel
Affiliation:
DME Nanotechnologie GmbH; Geysostraße 13, 38106 Braunschweig, Germany
Fang Zhou
Affiliation:
Carl Zeiss Microscopy, GmbH; Carl-Zeiss-Straße 22, 73447 Oberkochen, Germany
Soeren Eyhusen
Affiliation:
Carl Zeiss Microscopy, LLC; 1 Zeiss Dr., Thornwood, NY 10594, USA

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 992 - 993
Copyright
Copyright © Microscopy Society of America 2014 

References

[1] http://microscopy.zeiss.com/microscopy/en_de/products/electron-microscopy/merlinmaterials.html.Google Scholar
[2] Ahttp: // www.dme-spm.com/ remafm. html.Google Scholar
[3] Zeiss Merlin FE-SEM - AFM, http://www.youtube.com/watch?v=0xx8GCcrLPg.Google Scholar
[4] Watch the AFM tip at work, http://www.youtube.com/watch?v=yvZIeHfF364.Google Scholar
[5] Study of Helium Ion Beam Exposed Nanostructures by in situ AFM, obtainable at [1].Google Scholar
[6] Manipulating Graphene in a hybrid SEM AFM, http://www.youtube.com/watch?v=upaX7t_rh3E.Google Scholar
[7] Saive, R., et al, Adv. Funct. Mater., 23 (2013), pp. 5854-5860.Google Scholar
[8] Saive, R., et al., Organic Electronics, 14 (2013). pp. 1570-1576.Google Scholar