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HRTEM Study on the Interface of Si-based Resonant Tunneling Diodes (RTD) by UHV Wafer Bonding Technology

Published online by Cambridge University Press:  05 August 2007

TH Lee
Affiliation:
University of Texas at Dallas
DK Cha
Affiliation:
University of Texas at Dallas
JG Wang
Affiliation:
University of Texas at Dallas
J Jeon
Affiliation:
University of Texas at Dallas
J Kim
Affiliation:
University of Texas at Dallas
RM Wallace
Affiliation:
University of Texas at Dallas
BE Gnade
Affiliation:
University of Texas at Dallas
MJ Kim
Affiliation:
University of Texas at Dallas
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2007 in Ft. Lauderdale, Florida, USA, August 5 – August 9, 2007

Type
Research Article
Copyright
© 2007 Microscopy Society of America

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