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High-Resolution Cathodoluminescence Hyperspectral Imaging of Nitride Nanostructures

Published online by Cambridge University Press:  05 December 2012

Paul R. Edwards ,
Lethy Krishnan Jagadamma ,
Jochen Bruckbauer ,
Chaowang Liu ,
Philip Shields ,
Duncan Allsopp ,
Tao Wang  and
Robert W. Martin
Paul R. Edwards*
Affiliation:
Department of Physics, SUPA, University of Strathclyde, Glasgow G4 0NG, United Kingdom
Lethy Krishnan Jagadamma
Affiliation:
Department of Physics, SUPA, University of Strathclyde, Glasgow G4 0NG, United Kingdom
Jochen Bruckbauer
Affiliation:
Department of Physics, SUPA, University of Strathclyde, Glasgow G4 0NG, United Kingdom
Chaowang Liu
Affiliation:
Department of Electronic and Electrical Engineering, University of Bath, Bath BA2 7AY, United Kingdom
Philip Shields
Affiliation:
Department of Electronic and Electrical Engineering, University of Bath, Bath BA2 7AY, United Kingdom
Duncan Allsopp
Affiliation:
Department of Electronic and Electrical Engineering, University of Bath, Bath BA2 7AY, United Kingdom
Tao Wang
Affiliation:
EPSRC National Centre for III-V Technologies, Department of Electronic and Electrical Engineering, University of Sheffield, Sheffield S1 3JD, United Kingdom
Robert W. Martin
Affiliation:
Department of Physics, SUPA, University of Strathclyde, Glasgow G4 0NG, United Kingdom
*
*Corresponding author. E-mail: [email protected]
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Abstract

Hyperspectral cathodoluminescence imaging provides spectrally and spatially resolved information on luminescent materials within a single dataset. Pushing the technique toward its ultimate nanoscale spatial limit, while at the same time spectrally dispersing the collected light before detection, increases the challenge of generating low-noise images. This article describes aspects of the instrumentation, and in particular data treatment methods, which address this problem. The methods are demonstrated by applying them to the analysis of nanoscale defect features and fabricated nanostructures in III-nitride-based materials.

Keywords

cathodoluminescencehyperspectral imaginggallium nitrideprincipal component analysismultivariate statistical analysisSEM
Type
Special Section: Cathodoluminescence
Information
Microscopy and Microanalysis , Volume 18 , Issue 6 , December 2012 , pp. 1212 - 1219
Copyright
Copyright © Microscopy Society of America 2012

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References

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