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Highly Stable 300kV Cold Field Emission Gun for 50pm Resolution Electron Microscopy

Published online by Cambridge University Press:  26 July 2009

T Tomita
Affiliation:
Japan Science and Technology Agency,Japan
Y Tanishiro
Affiliation:
Japan Science and Technology Agency,Japan
T Miyata
Affiliation:
JEOL Ltd ,Japan
H Sawada
Affiliation:
Japan Science and Technology Agency,Japan
F Hosokawa
Affiliation:
Japan Science and Technology Agency,Japan
T Kaneyama
Affiliation:
Japan Science and Technology Agency,Japan
Y Kondo
Affiliation:
Japan Science and Technology Agency,Japan
T Tanaka
Affiliation:
Japan Science and Technology Agency,Japan
Y Ohshima
Affiliation:
Japan Science and Technology Agency,Japan
N Yamamoto
Affiliation:
Japan Science and Technology Agency,Japan
K Takayanagi
Affiliation:
Japan Science and Technology Agency,Japan

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Copyright
Copyright © Microscopy Society of America 2009