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High-Density FIB-SEM Tomography via Real-Time Imaging

Published online by Cambridge University Press:  01 August 2005

E Principe  and
P Sobol
E Principe
Affiliation:
Carl Zeiss SMT, Redwood City, California
P Sobol
Affiliation:
Monona Analytical, Monona, Wisconsin

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 322 - 323
Copyright
© 2005 Microscopy Society of America