High Throughput Sample Preparation and Analysis Using an Inductively Coupled Plasma (ICP) Focused Ion Beam Source

S Kellogg; R Schampers; S Zhang; A Graupera; T Miller; WD Laur; A Dirriwachter

doi:10.1017/S1431927610058733

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

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Özdöl, Vasfi Burak Srot, Vesna and van Aken, Peter A. 2012. Handbook of Nanoscopy. p. 473.

Altmann, Frank and Young, Richard J. 2014. Site-specific metrology, inspection, and failure analysis of three-dimensional interconnects using focused ion beam technology. Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 13, Issue. 1, p. 011202.

Utlaut, M. 2014. Nanolithography. p. 116.

Burnett, T.L. Kelley, R. Winiarski, B. Contreras, L. Daly, M. Gholinia, A. Burke, M.G. and Withers, P.J. 2016. Large volume serial section tomography by Xe Plasma FIB dual beam microscopy. Ultramicroscopy, Vol. 161, Issue. , p. 119.

Subramaniam, Srinivas Huening, Jennifer Richards, John and Johnson, Kevin 2017. A Comprehensive Approach Towards Optimizing the Xenon Plasma Focused Ion Beam Instrument for Semiconductor Failure Analysis Applications. Microscopy and Microanalysis, Vol. 23, Issue. 4, p. 769.

van Kouwen, Leon and Kruit, Pieter 2018. Brightness measurements of the nano-aperture ion source. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 36, Issue. 6,

van Kouwen, Leon 2019. Advances in Imaging and Electron Physics Including Proceedings CPO-10. Vol. 212, Issue. , p. 181.

Zhang, Yu Kong, Charlie Davidsen, Rasmus Schmidt Scardera, Giuseppe Duan, Leiping Khoo, Kean Thong Payne, David N.R. Hoex, Bram and Abbott, Malcolm 2020. 3D characterisation using plasma FIB-SEM: A large-area tomography technique for complex surfaces like black silicon. Ultramicroscopy, Vol. 218, Issue. , p. 113084.

Sloyan, Karen Melkonyan, Henrik Apostoleris, Harry Dahlem, Marcus S Chiesa, Matteo and Al Ghaferi, Amal 2021. A review of focused ion beam applications in optical fibers. Nanotechnology, Vol. 32, Issue. 47, p. 472004.

Li, Ping Chen, Siyu Dai, Houfu Yang, Zhengmei Chen, Zhiquan Wang, Yasi Chen, Yiqin Peng, Wenqiang Shan, Wubin and Duan, Huigao 2021. Recent advances in focused ion beam nanofabrication for nanostructures and devices: fundamentals and applications. Nanoscale, Vol. 13, Issue. 3, p. 1529.

Rielli, Vitor Vieira Theska, Felix and Primig, Sophie 2022. Correlative Approach for Atom Probe Sample Preparation of Interfaces Using Plasma Focused Ion Beam Without Lift-Out. Microscopy and Microanalysis, Vol. 28, Issue. 4, p. 998.

McGuinness, Philippa H. 2022. Probing Unconventional Transport Regimes in Delafossite Metals. p. 19.

Qi, Xuan Lian, Yudong Xie, Luyang Wang, Yulei and Lu, Zhiwei 2024. Water quality detection based on UV-Vis and NIR spectroscopy: a review. Applied Spectroscopy Reviews, Vol. 59, Issue. 8, p. 1036.

Mandal, Ratan Chowdhury, Kunal and Halder, Sayak 2024. Comprehensive Materials Processing. p. 536.

Cui, Zheng 2024. Nanofabrication. p. 141.

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High Throughput Sample Preparation and Analysis Using an Inductively Coupled Plasma (ICP) Focused Ion Beam Source

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