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High and Low Beam Energy Imaging: Complementarity in a Monochromated XHR SEM

Published online by Cambridge University Press:  26 July 2009

LY Roussel
Affiliation:
FEI Company,Netherlands
I Gestmann
Affiliation:
FEI Company,Netherlands
M Darus
Affiliation:
FEI Company
F Morrissey
Affiliation:
FEI Company,Netherlands
DJ Stokes
Affiliation:
FEI Company,Netherlands

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Copyright
Copyright © Microscopy Society of America 2009