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HAADF and EELS Analysis of Ti Deposited on Si Substrate Prepared by FIB

Published online by Cambridge University Press:  08 April 2017

A Medina-Flores
Affiliation:
Universidad Michoacana de San Nicolás de Hidalgo, Mexico
L Béjar-Gómez
Affiliation:
Universidad Politecnica del Valle de Mexico, Mexico
J Rubio-Avalos
Affiliation:
Universidad Michoacana de San Nicolás de Hidalgo, Mexico
J Bernal
Affiliation:
Universidad Politecnica del Valle de Mexico, Mexico

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

Type
Abstract
Copyright
Copyright © Microscopy Society of America 2011