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Fundamental Constants for Quantitative X-Ray Microanalysis

Published online by Cambridge University Press:  02 July 2020

David C Joy*
Affiliation:
EM Facility, University of Tennessee, Knoxville, TN37996-0810and, Oak Ridge National Laboratory, Oak Ridge, TN37831-6064
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Extract

The development of quantitative X-ray microanalysis in the 1950s spurred the need for knowledge of the many parameters which describe the electron interaction, such as the ionization cross-sections, fluorescent yields, the electron stopping power, mass absorption coefficients, and others. Although classical microanalysis, which proceeds by measurements of the unknown specimen against a standard, can eliminate the need to know many of these parameters accurately, much current microanalysis is done on highly inhomogeneous samples for which comparison with a standard is much less useful procedure. The increased use of low beam energies also means that data is now required for L-, and M-lines which previously have been little used. Consequently there is an enhanced need for a reliable and agreed set of data on which to base calculations.

A common misconception is the belief that all of the quantities that are needed must already have been measured by somebody and so it is simply a matter of accessing this data.

Type
Mas Celebrates: Fifty Years of Electron Probe Microanalysis
Copyright
Copyright © Microscopy Society of America

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References

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(6) This work was partially funded by the Semiconductor Research Corporation under contract 96- LJ - 413.001. Oak Ridge National Laboratory is operated by Lockheed Martin Energy Research Corp. for the U.S. Department of Energy under contract number DE-AC05-96OR22464.Google Scholar