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Focused Ne+ Beam for Improved SIMS Analysis of Lithium Ion Batteries

Published online by Cambridge University Press:  05 August 2019

Fouzia Khanom*
Affiliation:
Carl Zeiss SMT, Inc. PCS Integration Center, One Corporation Way, Peabody, MA, USA.
U. Golla-Schindler
Affiliation:
Materials Research Institute (IMFAA), Aalen University, Aalen, Germany.
Timo Bernthaler
Affiliation:
Materials Research Institute (IMFAA), Aalen University, Aalen, Germany.
Gerhard Schneider
Affiliation:
Materials Research Institute (IMFAA), Aalen University, Aalen, Germany.
Brett Lewis
Affiliation:
Carl Zeiss SMT, Inc. PCS Integration Center, One Corporation Way, Peabody, MA, USA.
*
*Corresponding author: [email protected]

Abstract

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Type
Advances in Focused Ion Beam Instrumentation and Techniques
Copyright
Copyright © Microscopy Society of America 2019 

References

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[9]The authors from Aalen University want to acknowledge C. Guenther and M.A. Danzer for the samples and Federal Ministry for Economic Affairs and Energy (BMWi) Germany, for financial supportGoogle Scholar