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A Focused Ion Beam Specimen Preparation Method to Minimize Gallium Ion Concentration in Copper Atom-Probe Tomography Specimen Tips

Published online by Cambridge University Press:  27 August 2014

R. Prakash Kolli
Affiliation:
Department of Materials Science and Engineering, University of Maryland, College Park, MD, USA Materials Measurement Science Division, National Institute of Standards and Technology, Gaithersburg, MD, USA
Frederick Meisenkothen
Affiliation:
Materials Measurement Science Division, National Institute of Standards and Technology, Gaithersburg, MD, USA

Abstract

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Type
Abstract
Copyright
Copyright © Microscopy Society of America 2014 

References

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[8] Certain commercial equipment, instruments, or materials are identified in this paper in order to specify the experimental procedure adequately. Such identification is not intended to imply recommendation or endorsement by the National Institute of Standards and Technology, nor is it intended to imply that the materials or equipment identified are necessarily the best available for the purpose.Google Scholar