Hostname: page-component-586b7cd67f-rcrh6 Total loading time: 0 Render date: 2024-11-29T15:18:08.589Z Has data issue: false hasContentIssue false
  • English
  • Français

Focused Helium Ion Beam Nanomachining of Thin Membranes vs. Bulk Substrates

Published online by Cambridge University Press:  27 August 2014

E.M. Mutunga ,
S. Lockerman ,
S. Tan ,
R. Livengood ,
A.E. Vladár  and
K.L. Klein
E.M. Mutunga
Affiliation:
University of the District of Columbia, 4200 Connecticut Ave NW, Washington, DC 20008
S. Lockerman
Affiliation:
University of the District of Columbia, 4200 Connecticut Ave NW, Washington, DC 20008
S. Tan
Affiliation:
Intel Corporation, Santa Clara, CA, 95054
R. Livengood
Affiliation:
Intel Corporation, Santa Clara, CA, 95054
A.E. Vladár
Affiliation:
National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, MD 20899
K.L. Klein
Affiliation:
University of the District of Columbia, 4200 Connecticut Ave NW, Washington, DC 20008 National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, MD 20899

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 336 - 337
Copyright
Copyright © Microscopy Society of America 2014 

References

[1] Notte, J.A Microscopy Today 20, 16 (2012.Google Scholar
[2] Scipioni, L., et al., J. Vac. Sci. Technol. B 28, C6P18 (2010.Google Scholar
[3] Yang, J., et al., Nanotechnology 22, 285310 (2011.Google Scholar
[4] Scipioni, L, Zeiss, Carl Adv. Mat. Char.Workshop, U. Illinois (2012.Google Scholar
[5] Livengood, R., et al., J. Vac. Sci. Technol. B 27 (2009). 3244.Google Scholar
[6] Tan, S, Klein, K, Shima, D, Livengood, R, Mutunga, E, Vladar, A EIPBN proceedings (2014.Google Scholar
[7] Zeigler, J.F, Zeigler, M.D, Biersack, J.P SRIM-2012.03 modeling freeware.Google Scholar
[8] Marshall, M.M, Yang, J, Hall, A.R Scanning 34, 101 (2012.Google Scholar