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First experimental proof of spatial resolution improvement in a monochromized and Cs-corrected TEM

Published online by Cambridge University Press:  01 August 2004

B. Freitag
Affiliation:
FEI Electron Optics, Eindhoven, The Netherlands
S. Kujawa
Affiliation:
FEI Electron Optics, Eindhoven, The Netherlands
P. M. Mul
Affiliation:
FEI Electron Optics, Eindhoven, The Netherlands
P. C. Tiemeijer
Affiliation:
FEI Electron Optics, Eindhoven, The Netherlands
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Extract

Extended abstract of a paper presented at the Pre-Meeting Congress: Materials Research in an Aberration-Free Environment, at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, July 31 and August 1, 2004.

Type
Research Article
Copyright
© 2004 Microscopy Society of America

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