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FIB-SEM Instrument with Integrated Raman Spectroscopy for Correlative Microscopy

Published online by Cambridge University Press:  27 August 2014

Jaroslav Jiruse ,
Martin Hanicinec ,
Miloslav Havelka ,
Olaf Hollricher ,
Wolfram Ibach  and
Peter Spizig
Jaroslav Jiruse
Affiliation:
TESCAN Brno, s.r.o., Libusina trida 1, Brno, Czech Republic
Martin Hanicinec
Affiliation:
TESCAN Brno, s.r.o., Libusina trida 1, Brno, Czech Republic
Miloslav Havelka
Affiliation:
TESCAN Brno, s.r.o., Libusina trida 1, Brno, Czech Republic
Olaf Hollricher
Affiliation:
WITec GmbH, Lise-Meitner-Strasse 6, Ulm, Germany
Wolfram Ibach
Affiliation:
WITec GmbH, Lise-Meitner-Strasse 6, Ulm, Germany
Peter Spizig
Affiliation:
WITec GmbH, Lise-Meitner-Strasse 6, Ulm, Germany

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 990 - 991
Copyright
Copyright © Microscopy Society of America 2014 

References

[1] Jiruše, J., et al, New Ultra-High Resolution SEM for Imaging by Low Energy Electrons. Microsc. Microanal. 19 (Suppl. 2), 1302-1303 (2013).Google Scholar
[2] Jiruše, J., et al, Combined SEM-FIB-TOF-EDX-EBSD as a Multifunctional Tool. Microsc. Microanal. 18 (Suppl. 2), 638-639 (2012).Google Scholar
[3] The research leading to these results has received funding from the European Union Seventh Framework Program [FP7/2007-2013] under grant agreement n°280566, project UnivSEM.Google Scholar