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FIB TEM Sample Preparation of Deeply Buried Interfaces

Published online by Cambridge University Press:  08 April 2017

M Rye ,
J Michael  and
N Yang
M Rye
Affiliation:
Sandia National Laboratories
J Michael
Affiliation:
Sandia National Laboratories
N Yang
Affiliation:
Sandia National Laboratories

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 17 , Supplement S2 , July 2011 , pp. 696 - 697
Copyright
Copyright © Microscopy Society of America 2011