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FIB Sample Preparation for In Depth EDS Analysis

Published online by Cambridge University Press:  05 August 2019

Roberto Garcia
Affiliation:
Analytical Instrumentation Facility, North Carolina State University, Raleigh, NC, USA.
Fred A. Stevie*
Affiliation:
Analytical Instrumentation Facility, North Carolina State University, Raleigh, NC, USA.
Lucille Giannuzzi
Affiliation:
EXpressLO LLC, Lehigh Acres, FL, USA.
*
*Corresponding author: [email protected]

Abstract

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Type
Advances in Focused Ion Beam Instrumentation and Techniques
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Introduction to Focused Ion Beams”, ed. Giannuzzi, LA and Stevie, FA (Springer, NY).Google Scholar
[2]Stevie, FA, Vartuli, CB, Giannuzzi, LA, Shofner, TL, Brown, SR, Rossie, B, Hillion, F, Mills, RH, Antonell, M, Irwin, RB, and Purcell, BM, Surface and Interface Analysis 31 (2001), p. 345-351.Google Scholar
[3]Garcia, R, Liu, Y, Stevie, FA, Microsc. Microanal. 22 (Suppl 3) (2016) p. 138-139.Google Scholar
[4]Vartuli, CB, Stevie, FA, Bindell, JB, Shofner, TL, and Purcell, BM, Microscopy and Microanalysis Proceedings 5, Supplement 2 (1999) p. 896-897.Google Scholar
[5]This work was performed in part at the Analytical Instrumentation Facility (AIF) at North Carolina State University, which is supported by the State of North Carolina and the National Science Foundation (award number ECCS-1542015). The AIF is a member of the North Carolina Research Triangle Nanotechnology Network (RTNN), a site in the National Nanotechnology Coordinated Infrastructure (NNCI).Google Scholar