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FIB Damage Reduction Technique in TEM Membrane Using Triple Beam System

Published online by Cambridge University Press:  31 July 2006

S Sadayama ,
H Takahashi ,
K Iwasaki  and
T Fujii
S Sadayama
Affiliation:
SII NanoTechnology Inc.
H Takahashi
Affiliation:
SII NanoTechnology Inc.
K Iwasaki
Affiliation:
SII NanoTechnology Inc.
T Fujii
Affiliation:
SII NanoTechnology Inc.

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

Type
Abstract
Information
Microscopy and Microanalysis , Volume 12 , Issue S02 , August 2006 , pp. 1298 - 1299
Copyright
© 2006 Microscopy Society of America