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FIB Damage in Silicon: Amorphization or Redeposition?

Published online by Cambridge University Press:  01 November 2002

S. Rajsiri ,
B. W. Kempshall ,
S.M. Schwarz  and
L. A. Giannuzzi
S. Rajsiri
Affiliation:
Department of Mechanical, Materials, and Aerospace Engineering, University of Central Florida, 4000 Central Florida Blvd., Orlando, FL, 32816-2450
B. W. Kempshall
Affiliation:
Department of Mechanical, Materials, and Aerospace Engineering, University of Central Florida, 4000 Central Florida Blvd., Orlando, FL, 32816-2450
S.M. Schwarz
Affiliation:
Department of Mechanical, Materials, and Aerospace Engineering, University of Central Florida, 4000 Central Florida Blvd., Orlando, FL, 32816-2450
L. A. Giannuzzi
Affiliation:
Department of Mechanical, Materials, and Aerospace Engineering, University of Central Florida, 4000 Central Florida Blvd., Orlando, FL, 32816-2450

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 50 - 51
Copyright
Copyright © Microscopy Society of America 2002