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Feedback Control of Gas Chemistry Reactions in the FIB

Published online by Cambridge University Press:  01 August 2005

L Zaykova-Feldman  and
T M Moore
L Zaykova-Feldman
Affiliation:
Omniprobe
T M Moore
Affiliation:
Omniprobe

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 824 - 825
Copyright
© 2005 Microscopy Society of America