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Fast 3D Tomography of C4 Solder Bump by Using Xe Plasma Focused Ion Beam

Published online by Cambridge University Press:  09 October 2013

T. Hrncir ,
L. Hladik ,
J. Jiruse  and
F. Lopour
T. Hrncir
Affiliation:
L. Hladik
Affiliation:
J. Jiruse
Affiliation:
F. Lopour
Affiliation:

Abstract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 19 , Issue S2: Proceedings of Microscopy & Microanalysis 2013 , August 2013 , pp. 860 - 861
Copyright
Copyright © Microscopy Society of America 2013