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Fabrication of In-Plane Nanochannels by Focused Ion Beam Milling

Published online by Cambridge University Press:  09 October 2013

A. Kneller ,
Z.D. Harms ,
L. Selzer ,
A. Zlotnick  and
S.C. Jacobson
A. Kneller
Affiliation:
Z.D. Harms
Affiliation:
L. Selzer
Affiliation:
A. Zlotnick
Affiliation:
S.C. Jacobson
Affiliation:

Abstract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 19 , Issue S2: Proceedings of Microscopy & Microanalysis 2013 , August 2013 , pp. 918 - 919
Copyright
Copyright © Microscopy Society of America 2013