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Fabication of GaN islands at specific locations on Si substrates using FIB induced Ga surface precipitation and plasma nitridation

Published online by Cambridge University Press:  23 November 2012

H. Wang
Affiliation:
University of Pittsburgh, Pittsburgh, PA
J. Gray
Affiliation:
University of Pittsburgh, Pittsburgh, PA
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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Copyright
Copyright © Microscopy Society of America 2012

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