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Exploring the physical limits of transistor scaling using STEM

Published online by Cambridge University Press:  01 August 2003

D. A. Muller ,
P. M. Voyles ,
J. L. Grazul  and
G. D. Wilk
D. A. Muller
Affiliation:
Bell Labs, Lucent Technologies, 700 Mountain Ave., Murray Hill, NJ 07974-0636
P. M. Voyles
Affiliation:
Dept. of Materials Science and Engineering, University of Wisconsin – Madison, 1509 University Ave., Madison, WI, 53706-1595;
J. L. Grazul
Affiliation:
Bell Labs, Lucent Technologies, 700 Mountain Ave., Murray Hill, NJ 07974-0636
G. D. Wilk
Affiliation:
ASM America, 3440 East University Dr., Phoenix, AZ 85034

Abstract

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Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 1012 - 1013
Copyright
Copyright © Microscopy Society of America 2003