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Exploiting the Full Potential of the Advanced Two-hexapole Corrector for STEM

Published online by Cambridge University Press:  22 July 2022

Ryusuke Sagawa*
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, Japan
Akira Yasuhara
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, Japan
Hiroki Hashiguchi
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, Japan
Tomoyuki Naganuma
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, Japan
Shinichi Tanba
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, Japan
Takaki Ishikawa
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, Japan
Thomas Riedel
Affiliation:
Corrected Electron Optical Systems GmbH, Englerstr. 28, Heidelberg, Germany
Peter Hartel
Affiliation:
Corrected Electron Optical Systems GmbH, Englerstr. 28, Heidelberg, Germany
Martin Linck
Affiliation:
Corrected Electron Optical Systems GmbH, Englerstr. 28, Heidelberg, Germany
Stephan Uhlemann
Affiliation:
Corrected Electron Optical Systems GmbH, Englerstr. 28, Heidelberg, Germany
Heiko Müller
Affiliation:
Corrected Electron Optical Systems GmbH, Englerstr. 28, Heidelberg, Germany
Hidetaka Sawada
Affiliation:
JEOL USA, Inc., 11 Dearborn Road Peabody, MA, USA
*
*Corresponding author: [email protected]

Abstract

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Type
Advanced Imaging and Spectroscopy for Nanoscale Materials
Copyright
Copyright © Microscopy Society of America 2022

References

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