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Exploiting channeling in Helium Ion Microscopy

Published online by Cambridge University Press:  23 November 2012

G. Hlawacek ,
V. Veligura ,
T.F. Mocking ,
A. George ,
R. van Gastel ,
H.W. Zandvliet ,
B. Poelsema  and
S. Lorbek
G. Hlawacek
Affiliation:
University of Twente, Enschede, Netherlands
V. Veligura
Affiliation:
University of Twente, Enschede, Netherlands
T.F. Mocking
Affiliation:
University of Twente, Enschede, Netherlands
A. George
Affiliation:
University of Twente, Enschede, Netherlands
R. van Gastel
Affiliation:
University of Twente, Enschede, Netherlands
H.W. Zandvliet
Affiliation:
University of Twente, Enschede, Netherlands
B. Poelsema
Affiliation:
University of Twente, Enschede, Netherlands
S. Lorbek
Affiliation:
Montanuniversitaet Leoben, Leoben, Austria
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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 18 , Issue S2: Proceedings of Microscopy & Microanalysis 2012 , July 2012 , pp. 806 - 807
Copyright
Copyright © Microscopy Society of America 2012

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