Hostname: page-component-586b7cd67f-t7fkt Total loading time: 0 Render date: 2024-11-21T22:28:34.048Z Has data issue: false hasContentIssue false
  • English
  • Français

Expanding the Energy Range from eV to MeV and Fabrication of Sources Enabling Novel Focused Ion Beam Nanofabrication and Modification

Published online by Cambridge University Press:  22 July 2022

Michael Titze ,
Aaron Katzenmeyer ,
Vigneshwaran Chandrasekaran ,
Anthony Flores ,
Barney Doyle ,
Yongqiang Wang ,
Han Htoon  and
Edward Bielejec
Michael Titze
Affiliation:
Sandia National Laboratories, Albuquerque, NM, USA
Aaron Katzenmeyer
Affiliation:
Sandia National Laboratories, Albuquerque, NM, USA
Vigneshwaran Chandrasekaran
Affiliation:
Los Alamos National Laboratory, Los Alamos, NM, USA
Anthony Flores
Affiliation:
Sandia National Laboratories, Albuquerque, NM, USA
Barney Doyle
Affiliation:
Sandia National Laboratories, Albuquerque, NM, USA
Yongqiang Wang
Affiliation:
Los Alamos National Laboratory, Los Alamos, NM, USA
Han Htoon
Affiliation:
Los Alamos National Laboratory, Los Alamos, NM, USA
Edward Bielejec
Affiliation:
Sandia National Laboratories, Albuquerque, NM, USA

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Advances in Focused Ion Beam Instrumentation, Applications and Techniques in Materials and Life Sciences
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 6 - 8
Check for updates
Copyright
Copyright © Microscopy Society of America 2022

References

Titze, M. et al. , arXiv:2112.02049Google Scholar
Lozovoi, A. et al. , Nat. Electron., 4, 717 (2021)10.1038/s41928-021-00656-zCrossRefGoogle Scholar
Doyle, B. L., Peercy, P. S., Appl. Phys. Lett. 34, 811 (1979)Google Scholar
SNL is managed and operated by NTESS under DOE NNSA contract DE-NA0003525. This work was performed, in part, at the Center for Integrated Nanotechnologies, an Office of Science User Facility operated for the U.S. Department of Energy (DOE) Office of Science.Google Scholar