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Excellent Agreement Between High Resolution EBSD and XRD Strain Measurements on Si1-xGex films on Si

Published online by Cambridge University Press:  09 October 2013

M.D. Vaudin ,
W.A. Osborn ,
L.H. Friedman  and
R.F. Cook
M.D. Vaudin
Affiliation:
W.A. Osborn
Affiliation:
L.H. Friedman
Affiliation:
R.F. Cook
Affiliation:

Abstract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 19 , Issue S2: Proceedings of Microscopy & Microanalysis 2013 , August 2013 , pp. 690 - 691
Copyright
Copyright © Microscopy Society of America 2013