Hostname: page-component-7bb8b95d7b-l4ctd Total loading time: 0 Render date: 2024-10-02T16:44:51.913Z Has data issue: false hasContentIssue false

Evaluation of Lattice-Spacing of SiGe/Si by NBD using Two-condenser-lens TEM

Published online by Cambridge University Press:  22 July 2022

Junji Yamanaka*
Affiliation:
University of Yamanashi, Center for Inst. Analysis, Kofu, Japan
Takuya Oguni
Affiliation:
University of Yamanashi, Center for Inst. Analysis, Kofu, Japan
Yuichi Sano
Affiliation:
University of Yamanashi, Center for Inst. Analysis, Kofu, Japan
Yusuke Ohshima
Affiliation:
University of Yamanashi, Center for Cry. Sci. & Tech., Kofu, Japan
Atsushi Onogawa
Affiliation:
University of Yamanashi, Center for Cry. Sci. & Tech., Kofu, Japan
Kosuke O. Hara
Affiliation:
University of Yamanashi, Center for Cry. Sci. & Tech., Kofu, Japan
Keisuke Arimoto
Affiliation:
University of Yamanashi, Center for Cry. Sci. & Tech., Kofu, Japan
*
*Corresponding author: [email protected]

Abstract

Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
General Physical Sciences
Copyright
Copyright © Microscopy Society of America 2022