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Evaluation method of image resolution for the aberration-corrected STEM

Published online by Cambridge University Press:  30 July 2021

Yasuhiko Sugigaki ,
Yoshifumi Taniguchi ,
Yudai Kubo ,
Kuniyasu Nakamura ,
Susumu Koyama  and
Mitsugu Sato
Yasuhiko Sugigaki
Affiliation:
Hitachi High-Tech Corporation, Hitachinaka-shi, Ibaraki, Japan
Yoshifumi Taniguchi
Affiliation:
Hitachi High-Tech Corporation, Hitachinaka-shi, Ibaraki, Japan
Yudai Kubo
Affiliation:
Hitachi High-Tech Corporation, Hitachinaka-shi, Ibaraki, Japan
Kuniyasu Nakamura
Affiliation:
Hitachi High-Tech Corporation, Hitachinaka-shi, Ibaraki, Japan
Susumu Koyama
Affiliation:
Hitachi High-Tech Corporation, Hitachinaka-shi, Ibaraki, Japan
Mitsugu Sato
Affiliation:
Hitachi High-Tech Corporation, Hitachinaka-shi, Ibaraki, Japan

Abstract

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Type
Advances in Analytical STEM-in-SEM
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 1594 - 1595
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Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

Jesson, D.E. and Pennycook, S.J.: Proc. Roy. Soc. Lond., A441, 26 (1993).Google Scholar
[2] Nakamura, K., Kakibayashi, H., Kanehori, K. and Tanaka, N., Journal of Electron Microscopy 1, 33 (1997).CrossRefGoogle Scholar