Hostname: page-component-586b7cd67f-rcrh6 Total loading time: 0 Render date: 2024-11-26T16:25:29.881Z Has data issue: false hasContentIssue false
  • English
  • Français

Enabling Future Nanotomography and Nanofabrication with Crossbeam Technology

Published online by Cambridge University Press:  27 August 2014

Ingo Schulmeyer  and
Martin Kienle
Ingo Schulmeyer
Affiliation:
Carl Zeiss Microscopy GmbH, Carl-Zeiss-Straße 22, 73447 Oberkochen, Germany
Martin Kienle
Affiliation:
Carl Zeiss Microscopy GmbH, Carl-Zeiss-Straße 22, 73447 Oberkochen, Germany

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 1110 - 1111
Copyright
Copyright © Microscopy Society of America 2014 

References

[1] Holzer, L. & Cantoni, M. Review of FIB-tomography, Nanofabrication Using Focused Ion and Electron Beams: Principles and Applications (2011), p. 410ff.Google Scholar
[2] Lechner, L., Biskupek, J. and Kaiser, U. Improved Focused Ion Beam Target Preparation of (S)TEM Specimen - A Method for Obtaining Ultrathin Lamellae, Microscopy and Microanalysis 18 (2012), p. 379-384.Google Scholar