Hostname: page-component-586b7cd67f-dsjbd Total loading time: 0 Render date: 2024-11-23T09:14:26.471Z Has data issue: false hasContentIssue false
  • English
  • Français

Electron Tomography of Microelectronic Devices

Published online by Cambridge University Press:  22 July 2003

K.-H. Min  and
J. Mardinly
K.-H. Min
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, CA 9430
J. Mardinly
Affiliation:
Materials Technology, Intel Corp., Santa Clara, CA 9505

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 502 - 503
Copyright
Copyright © Microscopy Society of America 2003